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Video encyclopedia

Photolithography

Artistic techniques

Photolithography, also termed optical lithography or UV lithography, is a process used in microfabrication to pattern parts of a thin film or the bulk of a substrate. It uses light to transfer a geometric pattern from a photomask to a light-sensitive chemical "photoresist", or simply "resist," on the substrate. A series of chemical treatments then either engraves the exposure pattern into the material or enables deposition of a new material in the desired pattern upon the material underneath the photo resist. For example, in complex integrated circuits, a modern CMOS wafer will go through the photolithographic cycle up to 50 times.

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  • General 

  • History 

  • Basic procedure 

  • Exposure ("printing") systems 

  • Resolution in projection systems 

  • Light sources 

  • Experimental methods 

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