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10 nm lithography process

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Semiconductor production process explained

In semiconductor fabrication, the International Technology Roadmap for Semiconductors (ITRS) defines the 10 nm process as the MOSFET technology node following the 14 nm node. "10 nm class" denotes chips made using process technologies between 10 and 20 nm.
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    • Background 

    • Technology production history 

    • Foundry 

    • DRAM "10 nm class"