How to Measure the Surface of a Plano Optic with a ZYGO Laser Interferometer System
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Interferometer | animation
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5 inch AMI Wafer from 1999
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Mirau
A Mirau interferometer works on the same basic principle as a Michelson interferometer. The difference between the two is in the physical location of the reference arm. The reference arm of a Mirau interferometer is located within a microscope objective assembly.