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Mirau interferometer

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WYKO DEKTAK RX40 Mirau Interferometer objective

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How to Measure the Surface of a Plano Optic with a ZYGO Laser Interferometer System

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Interferometer | animation

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5 inch AMI Wafer from 1999

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Mirau

A Mirau interferometer works on the same basic principle as a Michelson interferometer. The difference between the two is in the physical location of the reference arm. The reference arm of a Mirau interferometer is located within a microscope objective assembly.
    • Immersion Mirau InterferometerÂ