Semiconductor process simulation
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PhET Semiconductor Simulator
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Semiconductor simulation
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Understanding The FinFet Semiconductor Process
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Lam Research - Engineering at the Atomic Scale
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Semiconductor Devices Explained Using Active Simulation
Semiconductor process simulation is the modeling of the fabrication of semiconductor devices such as transistors. It is a branch of electronic design automation, and part of a sub-field known as technology CAD, or TCAD.
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Process simulation methods