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7 nm lithography process

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Samsung uses LPP EUV process for the first time to produce new 7nm chips | ZDNet

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IBM Unveils World's First 2 Nanometer Chip Technology

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Samsung Foundry 7nm LPP Process

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Intel Mask Operation: An Inside Look at a Critical Manufacturing Step

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Semiconductor production process explained

In semiconductor manufacturing, the International Technology Roadmap for Semiconductors defines the 7 nm process as the MOSFET technology node following the 10 nm node. It is based on FinFET technology, a type of multi-gate MOSFET technology.